High vacuum chamber, 77K-673K(liquid nitrogen)/4.5K-673K(liquid helium) temperature range, Compatible with IV/CV/RF test, radiation isolating design.
CGO-4 | 2"~6" Variable temperature vacuum probe station
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Features / Applications
◆ 2" to 6" wafer
◆ High vacuum chamber
◆ Radiation isolation
◆ 77K-673K/4.5K-673K temperature range
◆ Compatible with IV/CV/RF test
◆ Multi-probe arm, large travel range
◆ Modular design, seamless upgrade |
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Specifications
Chuck stage
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Model |
CGO-2/CGO-4/CGO-6 |
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Chuck size |
2"/4"/6" |
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Vacuum |
10-6 torr |
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View window |
2"/4"/6" |
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Probe arm number |
4~6 upon request |
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Cooling type |
Liquid nitrogen, liquid helium |
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Temperature range |
77k to 673k (liquid nitrogen), 4.5k to 673k (liquid helium) |
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Temperature accuracy |
1k / 0.1k / 0.01k upon request |
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Stability |
± 1k / ± 0.1k/ ± 0.01k |
Optical system
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Model |
Single tube microscope /stereo microscope /metalloscope |
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Magnification |
16X-200X/20X-4000X |
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Travel range |
X-Y up to 4"*4", vertical to 50.8mm |
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Camera |
CCD Camera |
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Illumination |
Coaxial and ring light |
Probe arm
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X-Y-Z travel range |
50mm-50mm-50mm |
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Resolution |
10μm/1μm |
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Cable |
Coaxial/triaxial/RF cable |
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Structure |
External arm, vacuum bellows |
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Leakage current |
10pA/100fA/10fA upon request |
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Frequency |
DC-67GHz |
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Probe tip diameter |
0.5μm/1μm/2μm/5μm/10μm/20μm upon request |
Optional accessories
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Hot chuck |
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RF testing accessoriess |
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Shielding box |
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Vibration free table |
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High voltage test accessories |
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Laser system |
Specifications and designs are subject to change without notice.
All Rights Reserved. Shenzhen Cindbest Technology Co., Ltd
Shenzhen Cindbest Technology Co., Ltd
Add: 8F Weihuada Industrial Park No.5 Lirong Rd Xinshi Com Dalang St Longhua Dist Shenzhen,China
Tel: 0755-29412885
E-mail: aldrich@cindbest.com
